Aplikazio biomedikoetan erabiltzeko eta mikroteknologietan oinarritutako gailuen diseinu, fabrikazio eta karakterizazioa. Plataforma mikrofluidikoak, biosentsoreak eta mikroelektrodo funtzionalak, bai eta tarteko egiturak ere, hala nola erreplikatzeko edo estanpatzeko moldeak edo nanozuntz polimerikoko mintzak. Silizio, beira, alumina edo material polimerikoko (termoplastikoak eta elastomeroak) substratuak. Metal nobleen elektrodoak, silizio oxidoaren, silizio nitruroan edo erretxina estrukturalen pasibazio-geruzen bidez eremu aktiboak konfinatzeko aukera dutenak.
Double side insulator-aligner (EVG-620 model) and semi-automatic hot-embossing system (EVG-510 model)
Electrospinning set-up for the fabrication of simple or coaxial polymeric nanofibers, with or without drug loading, in random or semi-ordered configuration according to pre-established patterns
Equipment for vapor phase deposition of thin films (PECVD) and reactive etching system (RIE), PLASMALAB 80+ from OXFORD Instruments models
Programmable wafer cutter MICROACE SERIES 3 from LOAD POINT LTD
PVD thin film deposition system, Pfeiffer CLASSIC 500 model with four 2DC-1 PDC-1 RF magnetron cathodes and the possibility of high temperature deposition
3D microstructure replication
Bonding of different materials
Bulk etching of silicon
Device design
Fabrication of polymer nanofiber membranes
hin film etching
Mould fabrication (with 3D microstructures)
Oxygen plasma treatments
Structure characterization
Thermal annealing
Thin film deposition
UV photolithography
Wafer dicing
CEIT
Contact person: Sergio Arana
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